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Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations

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journal contribution
posted on 25.02.2008, 14:24 by S.H. Lee, Felipe Iza, Jae Koo Lee
Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively and inductively coupled plasma reactors are presented. Potential profiles and electron/ ion kinetic information such as electron/ion energy distributions and temperatures are compared with experimental data as well as with other analytical and numerical results. One-dimensional PIC-MCC simulations compare favorably with experimental data obtained in capacitively coupled reactors over a wide range of pressure and power. Two-dimensional fluid simulations of capacitive discharges differs from the results of PIC-MCC simulations as nonlocal effects play an important role in these discharges. Fluid simulations as nonlocal inductively coupled plasmas, however, agree favorably with experimental observations.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

LEE, S.H., IZA, F. and LEE, J.K., 2006. Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma : comparisons with experiments and validations. Physics of plasmas, 13, 057102

Publisher

© American Institute of Physics

Publication date

2006

Notes

This article was published in the journal, Physics of plasmas and is also available at: http://pop.aip.org/pop/top.jsp or http://dx.doi.org/10.1063/1.2179430

ISSN

1070-664X

Language

en

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