sensors-21-05101.pdf (4.02 MB)
Download filePragmatic micrometre to millimetre calibration using multiple methods for low-coherence interferometer in embedded metrology applications
journal contribution
posted on 2021-07-27, 14:13 authored by Tom Hovell, Jon PetzingJon Petzing, Laura JusthamLaura Justham, Peter KinnellPeter KinnellIn-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three methods of dimensional calibration for a spectral domain low coherence interferometer using a reference laser interferometer versus two types of single material measure. Additionally, the impact of dataset sparsity is shown along with the effect of using a singular calibration dataset for system performance when operating across different media.
Funding
In Jet Interferometry for Ultra Precise Electrolyte Jet Machining
Engineering and Physical Sciences Research Council
Find out more...EPSRC Fellowship in Manufacturing: Collaborative Metrology Systems for High Value Manufacturing
Engineering and Physical Sciences Research Council
Find out more...History
School
- Mechanical, Electrical and Manufacturing Engineering
Published in
SensorsVolume
21Issue
15Publisher
MPDIVersion
- VoR (Version of Record)
Rights holder
© The authorsPublisher statement
This is an Open Access Article. It is published by MDPI under the Creative Commons Attribution 4.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/Acceptance date
2021-07-23Publication date
2021-07-28Copyright date
2021eISSN
1424-8220Publisher version
Language
- en