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Pragmatic micrometre to millimetre calibration using multiple methods for low-coherence interferometer in embedded metrology applications

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In-situ metrology utilised for surface topography, texture and form analysis along with quality control processes requires a high-level of reliability. Hence, a traceable method for calibrating the measurement system’s transfer function is required at regular intervals. This paper compares three methods of dimensional calibration for a spectral domain low coherence interferometer using a reference laser interferometer versus two types of single material measure. Additionally, the impact of dataset sparsity is shown along with the effect of using a singular calibration dataset for system performance when operating across different media.

Funding

EPSRC Fellowship in Manufacturing: Collaborative Metrology Systems for High Value Manufacturing

Engineering and Physical Sciences Research Council

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In Jet Interferometry for Ultra Precise Electrolyte Jet Machining

Engineering and Physical Sciences Research Council

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History

School

  • Mechanical, Electrical and Manufacturing Engineering

Published in

Sensors

Volume

21

Issue

15

Publisher

MPDI

Version

VoR (Version of Record)

Rights holder

© The authors

Publisher statement

This is an Open Access Article. It is published by MDPI under the Creative Commons Attribution 4.0 Unported Licence (CC BY). Full details of this licence are available at: http://creativecommons.org/licenses/by/4.0/

Acceptance date

23/07/2021

Publication date

2021-07-28

Copyright date

2021

eISSN

1424-8220

Language

en

Depositor

Dr Jon Petzing. Deposit date: 27 July 2021

Article number

5101