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Download filePulsed laser deposition of metallic multilayers: the influence of laser power on microstructure
journal contribution
posted on 2012-10-22, 13:18 authored by Mohamed S.K. Al-Busaidy, Olga Kusmartseva, Michael CropperMultilayers of Co and Cu on Si(111) substrates have been produced by pulsed laser deposition at the second harmonic of a Nd:YAG laser (532 nm). The effect of varying the laser power on the film microstructure has been investigated using grazing incidence X-ray reflectivity measurements. Quantitative analysis of the reflectivity curves indicates that higher laser powers are associated with greater intermixing at the Co/Cu interfaces. Offset scans indicate that there is conformal roughness. The deposition process introduces some droplets into the layers, principally of Cu.
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