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Pulsed laser deposition of metallic multilayers: the influence of laser power on microstructure

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posted on 22.10.2012, 13:18 authored by Mohamed S.K. Al-Busaidy, Olga Kusmartseva, Michael CropperMichael Cropper
Multilayers of Co and Cu on Si(111) substrates have been produced by pulsed laser deposition at the second harmonic of a Nd:YAG laser (532 nm). The effect of varying the laser power on the film microstructure has been investigated using grazing incidence X-ray reflectivity measurements. Quantitative analysis of the reflectivity curves indicates that higher laser powers are associated with greater intermixing at the Co/Cu interfaces. Offset scans indicate that there is conformal roughness. The deposition process introduces some droplets into the layers, principally of Cu.

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  • Science

Department

  • Physics

Citation

AL-BUSAIDY, M.S., KUSMARTSEVA, O.E. and CROPPER, 2004. Pulsed laser deposition of metallic multilayers: the influence of laser power on microstructure. Applied Physics A - Materials Science and Processing, 79 (4-6), pp.1453-1456.

Publisher

© Springer

Version

AM (Accepted Manuscript)

Publication date

2004

Notes

This article was accepted for publication in the journal Applied Physics A: Materials Science and Processing. The final publication is available at www.springerlink.com.

ISSN

0947-8396

eISSN

1432-0630

Language

en

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