Recyclying of Nd-Fe-B alloy for fabrications of three-dimensional magnetic micro-components

This paper presents a new fabrication process for producing magnetic microcomponents. The process is based on micropowder injection moulding technology, while the micro moulds are produced using microelectromechanical systems MEMS) technology. The process involves 1) fabrication of polydimethylsiloxane PDMS) micro moulds from SU-8 masters, which are produced using UV photolithography process; 2) mould filling with magnetic powder and demoulding; and 3) sintering of moulded components in vacuum. The proposed process has been used to sinter Nd-Fe-B microcomponents successfully without using binder system. This research proposes a new approach to fabricate 3-D magnetic microcomponents to meet the needs in applications where magnetic field required.