Refractive index determination by coherence scanning interferometry
journal contributionposted on 2016-06-17, 13:53 authored by Hiro Yoshino, Piotr Kaminski, Roger Smith, Michael WallsMichael Walls, D. Mansfield
Coherence scanning interferometry is established as a powerful noncontact, three-dimensional, metrology technique used to determine accurate surface roughness and topography measurements with subnanometer precision. The helical complex field (HCF) function is a topographically defined helix modulated by the electrical field reflectance, originally developed for the measurement of thin films. An approach to extend the capability of the HCF function to determine the spectral refractive index of a substrate or absorbing film has recently been proposed. In this paper, we confirm this new capability, demonstrating it on surfaces of silicon, gold, and a gold/ palladium alloy using silica and zirconia oxide thin films. These refractive index dispersion measurements show good agreement with those obtained by spectroscopic ellipsometry
Engineering and Physical Sciences Research Council (EPSRC) (EP/J017361/1, EP/M014297/1).
- Mechanical, Electrical and Manufacturing Engineering
Published inApplied Optics
Pages4253 - 4260
CitationYOSHINO, H. ... et al., 2016. Refractive index determination by coherence scanning interferometry. Applied Optics, 55 (15), pp. 4253 - 4260.
PublisherOptical Society of America
- VoR (Version of Record)
Publisher statementThis work is made available according to the conditions of the Creative Commons Attribution 4.0 International (CC BY 4.0) licence. Full details of this licence are available at: http://creativecommons.org/licenses/ by/4.0/
NotesPublished by The Optical Society under the terms of the Creative Commons Attribution 4.0 License. Further distribution of this work must maintain attribution to the author(s) and the published article’s title, journal citation, and DOI.