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Soft nanolithography by polymer fibers
journal contributionposted on 11.06.2015, 14:05 authored by Deyu Tu, Stefano Pagliara, Andrea Camposeo, Giovanni Potente, Elisa MeleElisa Mele, Roberto Cingolani, Dario Pisignano
We report on the use of polymer fibers for large-area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increases the achieved resolution during pattern transfer. In this way, we realize polymer field effect transistors with channel length and width as low as 250 nm that are expected to show transistor transition frequency up to a few MHz, and are thus exploitable as low-cost radio-frequency identification devices.
We gratefully acknowledge the financial support from the Regional Strategic Project “Ponamat” (PS_016) and the FIRB Contract RBIP06SH3W. This work is also performed in the framework of the FIRB RBFR08DJZI “Futuro in Ricerca”.
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