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Soft nanolithography by polymer fibers

journal contribution
posted on 11.06.2015, 14:05 by Deyu Tu, Stefano Pagliara, Andrea Camposeo, Giovanni Potente, Elisa MeleElisa Mele, Roberto Cingolani, Dario Pisignano
We report on the use of polymer fibers for large-area soft nanolithography on organic and inorganic surfaces with 50 nm resolution. The morphology of fibers and of the corresponding patterned gap is investigated, demonstrating a lateral dimension downscaling of up to nine times, which greatly increases the achieved resolution during pattern transfer. In this way, we realize poly­mer field effect transistors with channel length and width as low as 250 nm that are expected to show transistor transition frequency up to a few MHz, and are thus exploitable as low-cost radio-frequency identification devices.

Funding

We gratefully acknowledge the financial support from the Regional Strategic Project “Ponamat” (PS_016) and the FIRB Contract RBIP06SH3W. This work is also performed in the framework of the FIRB RBFR08DJZI “Futuro in Ricerca”.

History

School

  • Aeronautical, Automotive, Chemical and Materials Engineering

Department

  • Materials

Published in

ADVANCED FUNCTIONAL MATERIALS

Volume

21

Issue

6

Pages

1140 - 1145 (6)

Citation

TU, D. ... et al, 2011. Soft nanolithography by polymer fibers. Advanced Functional Materials, 21 (6), pp. 1140 - 1145.

Publisher

© WILEY-VCH Verlag GmbH & Co

Version

VoR (Version of Record)

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/

Publication date

2011

Notes

This article is closed access.

ISSN

1616-301X

Language

en