File(s) under permanent embargo

Reason: This item is currently closed access.

The mathematical modelling of focussed ion beam systems

journal contribution
posted on 29.01.2014, 10:19 by Robert J. Amos, G.A. Evans, Roger Smith
Computer simulation of focused ion beam systems plays an important role in the design of many scientific instruments. This paper describes a computational technique which has been developed for medium sized computers and which has been applied to a number of instrument design applications . The applications include individual ion lcn cs, extraction optics for ions in surface analytical instruments and the design of columns for ion beam lithography.

History

School

  • Science

Department

  • Mathematical Sciences

Citation

AMOS, R.J., EVANS, G.A. and SMITH, R., 1987. The mathematical modelling of focussed ion beam systems. Mathematical Engineering in Industry, 1 (3), pp. 191 - 213.

Publisher

© VNU Science Press

Version

VoR (Version of Record)

Publication date

1987

Notes

Closed access. This article was published in the journal, Mathematical Engineering in Industry [© VNU Science Press].

ISSN

0169-121X

Language

en

Exports

Logo branding

Keywords

Exports