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The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing

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posted on 10.01.2013, 13:22 by Yan Zhang, Changqing Liu, David Whalley
This paper reports the penetration limit of via holes through dissolving dielectric polymer thin films by inkjet printing. It was found that both the outer diameter of via holes and the polymer thickness affect the penetration depth from the experimental results. Based on this finding, a more accurate relationship between the inner diameter of via holes and the diameter of in-flight droplets for different polymer thicknesses is obtained.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

ZHANG, Y., LIU, C. and WHALLEY, D.C., 2012. The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing. Applied Physics Letters, 101 (25), pp. 253302-1 - 253302-4.

Publisher

© American Institute of Physics

Version

VoR (Version of Record)

Publication date

2012

Notes

This article was published in the journal, Applied Physics Letters [© American Institute of Physics] and the definitive version is available at: http://dx.doi.org/10.1063/1.4772796

ISSN

0003-6951

eISSN

1077-3118

Language

en

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