The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing

Zhang, Yan; Liu, Changqing; Whalley, David

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The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing

journal contribution

posted on 10.01.2013, 13:22 authored by Yan Zhang, Changqing LiuChangqing Liu, David Whalley

This paper reports the penetration limit of via holes through dissolving dielectric polymer thin films by inkjet printing. It was found that both the outer diameter of via holes and the polymer thickness affect the penetration depth from the experimental results. Based on this finding, a more accurate relationship between the inner diameter of via holes and the diameter of in-flight droplets for different polymer thicknesses is obtained.

History

School

Mechanical, Electrical and Manufacturing Engineering

Citation

ZHANG, Y., LIU, C. and WHALLEY, D.C., 2012. The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing. Applied Physics Letters, 101 (25), pp. 253302-1 - 253302-4.

Publisher

Version

VoR (Version of Record)

Publication date

2012

Notes

This article was published in the journal, Applied Physics Letters [© American Institute of Physics] and the definitive version is available at: http://dx.doi.org/10.1063/1.4772796