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Download fileThe penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing
journal contribution
posted on 2013-01-10, 13:22 authored by Yan Zhang, Changqing LiuChangqing Liu, David WhalleyThis paper reports the penetration limit of via holes through dissolving dielectric polymer thin films by inkjet printing. It was found that both the outer diameter of via holes and the polymer thickness affect the penetration depth from the experimental results. Based on this finding, a more accurate relationship between the inner diameter of via holes and the diameter of in-flight droplets for different polymer thicknesses is obtained.
History
School
- Mechanical, Electrical and Manufacturing Engineering
Citation
ZHANG, Y., LIU, C. and WHALLEY, D.C., 2012. The penetration limit of poly(4-vinyl phenol) thin films for etching via holes by inkjet printing. Applied Physics Letters, 101 (25), pp. 253302-1 - 253302-4.Publisher
© American Institute of PhysicsVersion
- VoR (Version of Record)
Publication date
2012Notes
This article was published in the journal, Applied Physics Letters [© American Institute of Physics] and the definitive version is available at: http://dx.doi.org/10.1063/1.4772796ISSN
0003-6951eISSN
1077-3118Publisher version
Language
- en