GPG+116v10[1].pdf (8.65 MB)

The measurement of rough surface topography using coherence scanning interferometry

Download (8.65 MB)
report
posted on 04.10.2013, 13:16 by Jon Petzing, Jeremy Coupland, Richard K. Leach
This guide describes good practice for the measurement and characterisation of rough surface topography using coherence scanning interferometry (commonly referred to as vertical scanning white light interferometry). It is aimed at users of coherence scanning interferometry for the optical measurement of surface texture within production and research environments. The general guidelines described herein can be applied to the measurement of rough surfaces exhibiting different types of surface topography. For the purpose of this guide, the definition of a rough surface is one that has features with heights ranging from approximately 10 nm to less than 100 µm

Funding

This Measurement Good Practice Guide has been produced and funded as part of the Engineering & Physical Sciences Research Council (EPSRC) Grand Challenge “Project 3D-Mintegration”.

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Citation

PETZING, J.N., COUPLAND,J.M. and LEACH, R.K., 2010. The measurement of rough surface topography using coherence scanning interferometry. NPL Measurement Good Practice Guide 116.

Publisher

National Physical Laboratory / © Queen’s printer and Controller of HMSO

Version

VoR (Version of Record)

Publication date

2010

Notes

This is a Measurement Good Practice Guide and it is also available at: http://www.npl.co.uk/publications/The-measurement-of-rough-surface-topography-using-coherence-scanning-interferometry.

ISSN

1368-6550

Language

en

Exports

Logo branding

Keywords

Exports