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Aerosol contamination of clean gases in tubes and valves

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thesis
posted on 26.02.2018 by Lesley D. Arnold
Ultra-clean process gases containing a very low level of particulate contamination are required in many industrial applications. This is particularly true in the Integrated Circuit industry, where considerable care is taken in the installation of gas delivery systems to clean rooms. However, virtually no quantitative information is available on the release of aerosol particles from the components which comprise such systems. An experimental programme was undertaken to assess the level of particle shedding from tubes and valves. [Continues.]

Funding

Loughborough University[?], Centre for Engineering Research into Contamination Control.

History

School

  • Aeronautical, Automotive, Chemical and Materials Engineering

Department

  • Chemical Engineering

Publisher

© L.D. Arnold

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 2.5 Generic (CC BY-NC-ND 2.5) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by-nc-nd/2.5/

Publication date

1991

Notes

A master's thesis submitted in partial fulfilment of the requirements for the award of Master of Philosophy at Loughborough University.

Language

en

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