Aerosol contamination of clean gases in tubes and valves
thesisposted on 26.02.2018 by Lesley D. Arnold
In order to distinguish essays and pre-prints from academic theses, we have a separate category. These are often much longer text based documents than a paper.
Ultra-clean process gases containing a very low level of particulate contamination are required in many industrial applications. This is particularly true in the Integrated Circuit industry, where considerable care is taken in the installation of gas delivery systems to clean rooms. However, virtually no quantitative information is available on the release of aerosol particles from the components which comprise such systems. An experimental programme was undertaken to assess the level of particle shedding from tubes and valves. [Continues.]
Loughborough University[?], Centre for Engineering Research into Contamination Control.
- Aeronautical, Automotive, Chemical and Materials Engineering
- Chemical Engineering