Aerosol contamination of clean gases in tubes and valves
thesisposted on 2018-02-26, 10:23 authored by Lesley D. Arnold
Ultra-clean process gases containing a very low level of particulate contamination are required in many industrial applications. This is particularly true in the Integrated Circuit industry, where considerable care is taken in the installation of gas delivery systems to clean rooms. However, virtually no quantitative information is available on the release of aerosol particles from the components which comprise such systems. An experimental programme was undertaken to assess the level of particle shedding from tubes and valves. [Continues.]
Loughborough University[?], Centre for Engineering Research into Contamination Control.
- Aeronautical, Automotive, Chemical and Materials Engineering
- Chemical Engineering
Publisher© L.D. Arnold
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NotesA master's thesis submitted in partial fulfilment of the requirements for the award of Master of Philosophy at Loughborough University.