Computational models of ion erosion

The work in this thesis examines computational models of ion erosion. It computes solutions to a non-linear wave equation which governs the surface motion. by the method of characteristics. Some experimental work on the rocking and rotation of samples of quartz which are ion-milled for use as surface acoustic wave resonators is compared with theoretical predictions. The computations pay particular attention to the motion of edges and the development of edges on the surface as the erosion proceeds. The thesis discussed secondary effects and examines the problems generated by erosion in microelectronic device manufacture. A line segment algorithm is also devised and programmed and applied to the modelling of ion reflection. Finally a binary collision algorithm is presented written recursively in Algol 68 in order to describe the sputtering process in terms of individual events. The computed sputtering yields are then used in the simulations of surface erosion described previously.