Excimer-laser-induced modifications of optical surfaces

The work in this thesis is a study of the interactions of a well characterized high power ultra violet excimer laser beam with solid optical quality surfaces, principally Al and Ge but with limited work on dielectrics. In order to characterize the beam and to monitor the changes induced on test surfaces by the beam, a computer controlled image processing system was developed. The system used the fluorescence from a UV absorbing glass to image the excimer beam and Schlieren imaging of the test surfaces with cw HeNe or pulsed dye laser illumination to monitor the induced changes. [Continues.]