Thesis-1995-Samuels.pdf (5.28 MB)

Focal position-controlled processing head for a laser pattern generator (LPG) for flexible micro-structuring

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thesis
posted on 02.11.2017, 12:24 by Uve Samuels
In micro-structuring processes a direct structuring of the substrate is, in most cases, not possible and therefore the profile is first obtained in photo resist and then, in a second step, transferred into the substrate. The resist structuring can be performed using the flexible characteristics of a laser pattern generator (LPG). In these processes, there is a beneficial relationship between the apparatus/equipment expense and the obtainable processing results. For a reproduceable processing result in all micro structuring tasks, good reproducibility of all process relevant parameters is required. In the application of a laser pattern generator, precise control of the focal position of the strongly focussed laser beam relative to the processing surface must be maintained. [Continues.]

History

School

  • Mechanical, Electrical and Manufacturing Engineering

Publisher

© Uve Samuels

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 2.5 Generic (CC BY-NC-ND 2.5) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by-nc-nd/2.5/

Publication date

1995

Notes

A Master's Thesis. Submitted in partial fulfilment of the requirements for the award of Master of Philosophy at Loughborough University.

Language

en

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