Loughborough University
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Ion erosion in surface analysis

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posted on 2018-01-10, 09:56 authored by S. Duncan
Low energy ion bombardment is a process used in surface analysis and in the electronics and telecommunications industries. Techniques such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface cleaning and for the provision of composition-depth profiles. [Continues.]

Funding

AERE Harwell. SERC.

History

School

  • Science

Department

  • Physics

Publisher

© S. Duncan

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 2.5 Generic (CC BY-NC-ND 2.5) licence. Full details of this licence are available at: http://creativecommons.org/licenses/by-nc-nd/2.5/

Publication date

1985

Notes

A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.

Language

  • en

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    Keywords

    untaggedPhysical Sciences not elsewhere classified

    Licence

    CC BY-NC-ND 2.5

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