Thesis-1985-Duncan.pdf (8 MB)
Ion erosion in surface analysis
thesisposted on 2018-01-10, 09:56 authored by S. Duncan
Low energy ion bombardment is a process used in surface analysis and in the electronics and telecommunications industries. Techniques such as Auger Electron Spectroscopy (AES), X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS) employ ion bombardment for surface cleaning and for the provision of composition-depth profiles. [Continues.]
AERE Harwell. SERC.
Publisher© S. Duncan
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NotesA Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.