posted on 2018-05-09, 09:14authored byNigel Danson
Precise control techniques are of fundamental importance in the accurate deposition of
optical, mechanical, electrical and magnetic thin films. The objective of this work was
twofold: to devise and evaluate novel control systems for reactive sputtering primarily
oxide films, and investigate the effects of these processes on resultant film properties. [Continues.]
This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/
Publication date
1996
Notes
A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.