Thesis-1996-Danson.pdf (4.83 MB)
Novel techniques for the control of the properties of reactively-sputtered thin films
thesisposted on 2018-05-09, 09:14 authored by Nigel Danson
Precise control techniques are of fundamental importance in the accurate deposition of optical, mechanical, electrical and magnetic thin films. The objective of this work was twofold: to devise and evaluate novel control systems for reactive sputtering primarily oxide films, and investigate the effects of these processes on resultant film properties. [Continues.]
Publisher© Nigel Danson
Publisher statementThis work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/
NotesA Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.