Thesis-1996-Danson.pdf (4.83 MB)

Novel techniques for the control of the properties of reactively-sputtered thin films

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thesis
posted on 09.05.2018, 09:14 by Nigel Danson
Precise control techniques are of fundamental importance in the accurate deposition of optical, mechanical, electrical and magnetic thin films. The objective of this work was twofold: to devise and evaluate novel control systems for reactive sputtering primarily oxide films, and investigate the effects of these processes on resultant film properties. [Continues.]

History

School

  • Science

Department

  • Physics

Publisher

© Nigel Danson

Publisher statement

This work is made available according to the conditions of the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (CC BY-NC-ND 4.0) licence. Full details of this licence are available at: https://creativecommons.org/licenses/by-nc-nd/4.0/

Publication date

1996

Notes

A Doctoral Thesis. Submitted in partial fulfilment of the requirements for the award of Doctor of Philosophy at Loughborough University.

Language

en

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