Pinhole-array-based hyperspectral interferometry for single-shot profilometry and depth-resolved displacement measurements

Surface profile and topography measurements of manufactured goods and components across all sectors of engineering are an integral component of a production process. Control measurements are taken on a regular basis to ensure items fulfil the required quality standards. Recent industry developments are driving towards more in-situ sensory measurement and monitoring systems. Depending on the dimensional layout and integral material properties of a sample, different metrological measurement techniques come into action for example Coherence Scanning Interferometry or focus variation microscopy. These techniques require high environmental stability and cannot be used for in-line inspection due to long mechanical scanning times. Recent developments in Hyperspectral Interferometry have laid the foundation for a potential single-shot absolute distance measurement technique suitable for in-line inspection. In this thesis a new version of Hyperspectral Interferometry is presented based on a pinhole array. [Continues.]