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Excimer laser machining of microvias in glass substrates for the manufacture of high density interconnects

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journal contribution
posted on 15.10.2013, 08:09 by Deepa Bhatt, David HuttDavid Hutt, Paul ConwayPaul Conway
Machining of microvias in 100-50 μm thick CMZ glass using an excimer laser (248 nm) was investigated. The effect of various laser process parameters: pulse energy, repetition rate, irradiation time were studied to optimise the microvia drilling process and a process window was identified. Through-hole drilling of 100 μm diameter (entry hole) microvias was achieved at a fluence (energy density) as low as 2.3 J/cm with an irradiation time of 30-40 s at a repetition rate of 20 Hz, giving a taper angle between 22-24° relative to the vertical. However, by increasing the fluence to 4.5 J/cm , this reduced the machining time to 5-10 s and taper angle to 14°, giving an exit hole diameter of around 45-50 μm. With 50 μm thick glass, it was possible to machine through-hole microvias with smaller entry hole diameters down to 40 μm. Machined microvias were characterised to investigate debris, recast layer and microcrack formation. Debris and recast layer around the machined features was minimised by using a protective photoresist layer coating on the glass and through appropriate operating parameter selection. Microcracks along the sidewalls of the microvias could not be avoided, but their severity depended on the laser machining parameters used. © 2012 Springer-Verlag.

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  • Mechanical, Electrical and Manufacturing Engineering

Citation

BHATT, D., HUTT, D.A. and CONWAY, P.P., 2012. Excimer laser machining of microvias in glass substrates for the manufacture of high density interconnects. Applied Physics B: Lasers and Optics, 108 (1), pp.137-147.

Publisher

© Springer Verlag

Version

AM (Accepted Manuscript)

Publication date

2012

Notes

This article was accepted for publication in the journal Applied Physics B: Lasers and Optics. The final publication is available at link.springer.com.

ISSN

0946-2171

eISSN

1432-0649

Language

en

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